Development of high-precision ultrasonic microscopy measurement system and measurement of the surface wave velocities of (100) silicon wafer

Author： Guorong Song   Yan Lu   Zhongyang Gao   Yanli Liu   Yinghui Guo   Cunfu He   Bin Wu  

Publisher： The British Institute of Non-Destructive Testing

ISSN： 1354-2575

Source： Insight - Non-Destructive Testing and Condition Monitoring, Vol.55, Iss.5, 2013-05, pp. : 253-256

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