Modeling the influence of surface effect and molecular force on pull-in voltage of rotational nano–micro mirror using 2-DOF model

Author: Koochi A.   Kazemi A.S.   Abadyan M.  

Publisher: NRC Research Press

ISSN: 1208-6045

Source: Canadian Journal of Physics, Vol.90, Iss.10, 2012-10, pp. : 963-974

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

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Abstract