A model based active vibration control for pedestal of semiconductor equipment

Author: Chung Yu-Liang   Chow Yong-Lo   Lin Jang-Yann  

Publisher: Institute of Noise Control Engineering

ISSN: 0736-2935

Source: INTER-NOISE and NOISE-CON Congress and Conference Proceedings, Vol.1999, Iss.5, 1999-12, pp. : 167-176

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