Acoustical characteristics based predictive diagnostics of individual dry pump for semiconductor manufacturing process

Author： Lee Kyuho   Lee Soogab   Lim Jong-Yoon   Cheung Wan-Sup  

Publisher： Institute of Noise Control Engineering

ISSN： 0736-2935

Source： INTER-NOISE and NOISE-CON Congress and Conference Proceedings, Vol.2011, Iss.8, 2011-07, pp. : 380-385

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