Deposition of Conductive Films on Semiconductor Substrates via Molybdenum Hexacarbonyl Decomposition in Glow Discharge

Author： Mittov O.N.   Ponomareva N.I.   Mittova I.Y.   Bezryadin M.N.  

Publisher： MAIK Nauka/Interperiodica

ISSN： 0020-1685

Source： Inorganic Materials, Vol.37, Iss.2, 2001-02, pp. : 161-165

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