Thermal Oxidation of Ti and Pb Thin Films Deposited on Single-Crystal Silicon

Author: Logacheva V.A.   Turenko E.A.   Khoviv A.M.   Yatsenko O.B.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 0020-1685

Source: Inorganic Materials, Vol.37, Iss.5, 2001-05, pp. : 466-468

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Abstract