Fabrication and Dielectric Properties of Multilayer Ta2O5/Al2O3 Nanostructures

Author: Ezhovskii Y.K.   Klusevich A.I.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 0020-1685

Source: Inorganic Materials, Vol.39, Iss.10, 2003-10, pp. : 1062-1066

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Abstract