High-Temperature Zinc Doping of Silicon from Zinc-Containing SiO2 Films

Author: Voronkova G.M.   Zuev A.V.   Zuev V.V.   Kiryukhin A.D.   Chepik L.F.   Troshina E.P.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 0020-1685

Source: Inorganic Materials, Vol.39, Iss.9, 2003-09, pp. : 904-910

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Abstract