Preparation and Properties of Thin HfO2 Films

Author: Yakovkina L.   Kichai V.   Smirnova T.   Kaichev V.   Shubin Yu.   Morozova N.   Zherikova K.   Igumenov I.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 0020-1685

Source: Inorganic Materials, Vol.41, Iss.12, 2005-12, pp. : 1300-1304

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract