Studies on the RF sputtered amorphous SiGe thin films

Author： Serényi M.   Lohner T.   Zolnai Z.   Petrik P.   Nemcsics Á.   Khánh N.   Turmezei P.  

Publisher： MAIK Nauka/Interperiodica

ISSN： 0020-1685

Source： Inorganic Materials, Vol.42, Iss.1, 2006-01, pp. : 3-6

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