Effect of vacuum annealing on the phase composition of In/SnO/Si, In/SnO₂/Si, and Sn/In₂O₃/Si heterostructures

Author： Khoviv A. Myachina T. Goncharov E. Logacheva V. Kasatkina E.

ISSN： 0020-1685

Source： Inorganic Materials, Vol.42, Iss.2, 2006-02, pp. : 108-111

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