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Taylor & Francis Ltd

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Comparative Study of Furnace and Flash Lamp Annealed Silicon Thin Films Grown by Plasma Enhanced Chemical Vapor Deposition

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MDPI

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Preparation of High-Purity Silicon for Solar Cells

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Inorganic Materials, Vol. 39, Iss. 7, 2003-07 ,pp. : 653-662

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Chemical Composition of Boron Carbonitride Films Grown by Plasma-Enhanced Chemical Vapor Deposition from Trimethylamineborane

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Superhigh-Rate Epitaxial Silicon Thick Film Deposition from Trichlorosilane by Mesoplasma Chemical Vapor Deposition

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Plasma Chemistry and Plasma Processing, Vol. 33, Iss. 2, 2013-04 ,pp. : 433-451

Springer Publishing Company

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