High-resolution Fourier-transform IR spectroscopic determination of impurities in silicon tetrafluoride and silane prepared from it

Author: Chuprov L.   Sennikov P.   Tokhadze K.   Ignatov S.   Schrems O.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 0020-1685

Source: Inorganic Materials, Vol.42, Iss.8, 2006-08, pp. : 924-931

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