Defect formation in silicon implanted with ∼1 MeV/nucleon ions

Author： Vabishchevich S.   Vabishchevich N.   Brinkevich D.   Prosolovich V.   Yankovskii Yu.  

Publisher： MAIK Nauka/Interperiodica

ISSN： 0020-1685

Source： Inorganic Materials, Vol.46, Iss.12, 2010-12, pp. : 1281-1284

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