A Two-Chamber Facility for Depositing Thin Films in a Transverse High-Frequency Discharge

Author: Strokan' G. P.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 0020-4412

Source: Instruments and Experimental Techniques, Vol.46, Iss.6, 2003-11, pp. : 838-841

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract