A method and devices of electron microtomography in scanning electron microscopy

Author: Gostev A.   Ditsman S.   Luk’yanov F.   Orlikovskii N.   Rau E.   Sennov R.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 0020-4412

Source: Instruments and Experimental Techniques, Vol.53, Iss.4, 2010-07, pp. : 581-590

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Abstract