Application of the Taguchi method in the optimization of laser micro-engraving of photomasks

Author: Chen Y. H.   Tam S. C.   Chen W. L.   Zheng H. Y.  

Publisher: Inderscience Publishers

ISSN: 0268-1900

Source: International Journal of Materials and Product Technology, Vol.11, Iss.3-4, 1996-11, pp. : 333-344

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