Technical Note: Excimer laser-induced etching of semiconductors and metals

Author： Peyre J .-L.   Riviere D.   Vannier C.   Villela G.  

Publisher： Inderscience Publishers

ISSN： 0268-1900

Source： International Journal of Materials and Product Technology, Vol.5, Iss.3, 1990-11, pp. : 301-310

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