Multilayer thin-film coatings based on chromium nitride and aluminum nitride: Comparative depth profiling by secondary ion mass spectrometry and glow-discharge optical emission spectrometry

Author： Tolstoguzov A.  

Publisher： MAIK Nauka/Interperiodica

ISSN： 1061-9348

Source： Journal of Analytical Chemistry, Vol.65, Iss.13, 2010-12, pp. : 1370-1376

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