Microwave characterization of undoped polycrystalline silicon

Author: Borodovskii P.   Buldygin A.   Drofa A.   Tokarev A.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 1063-7397

Source: Russian Microelectronics, Vol.35, Iss.6, 2006-12, pp. : 350-353

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Abstract