Damping of the Growth of Titanium Oxide Nanolayer Formed by Molecular Layer Deposition Technique on Oxidized Silicon Surface

Author： Dorofeev V. P.   Malygin A. A.   Kol'tsov S. I.  

Publisher： MAIK Nauka/Interperiodica

ISSN： 1070-4272

Source： Russian Journal of Applied Chemistry, Vol.77, Iss.7, 2004-07, pp. : 1061-1065

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