Reliability-based optimisation of chemical vapour deposition process

Author: George Pradeep   Lin Po Ting   Gea Hae Chang   Jaluria Yogesh  

Publisher: Inderscience Publishers

ISSN: 1479-389X

Source: International Journal of Reliability and Safety, Vol.3, Iss.4, 2009-09, pp. : 363-383

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Abstract