Anodic dissolution of copper in dilute hydroxylamine solutions: application to electrochemical mechanical planarisation of copper

Author： Muthukumaran A. Venkataraman N. Tamilmani S. Raghavan S.

Publisher： Maney Publishing

ISSN： 1743-2782

Source： Corrosion Engineering, Science and Technology, Vol.44, Iss.2, 2009-04, pp. : 101-107

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