Anodic dissolution of copper in dilute hydroxylamine solutions: application to electrochemical mechanical planarisation of copper

Author: Muthukumaran A.   Venkataraman N.   Tamilmani S.   Raghavan S.  

Publisher: Maney Publishing

ISSN: 1743-2782

Source: Corrosion Engineering, Science and Technology, Vol.44, Iss.2, 2009-04, pp. : 101-107

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Abstract