Silicon carbide for microelectromechanical systems

Author: Mehregany M.   Zorman C.A.   Roy S.   Fleischman A.J.     Rajan N.  

Publisher: Maney Publishing

ISSN: 1743-2804

Source: International Materials Reviews, Vol.45, Iss.3, 2000-03, pp. : 85-108

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Abstract