Annealing effects in undoped and phosphorus doped low temperature oxide layers

Author: Samitier J.   Moreno J. A.   Garrido B.   Marco S.   Ruiz O.   Morante J. R.  

Publisher: Maney Publishing

ISSN: 1743-2847

Source: Materials Science and Technology, Vol.11, Iss.11, 1995-11, pp. : 1219-1222

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Abstract