Sidewall Surface Roughness of Sputtered Silicon I: Surface Modelling

Author: Ali M. Y.   Hung N. P.   Ngoi B. K. A.   Yuan S.  

Publisher: Maney Publishing

ISSN: 1743-2944

Source: Surface Engineering, Vol.19, Iss.2, 2003-04, pp. : 97-103

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Abstract