Carbon nitride based hard multilayer films prepared by closed field unbalanced magnetron sputtering

Author： Vyas A.   Li L. K. Y.   Zhou Z. F.   Shen Y. G.  

Publisher： Maney Publishing

ISSN： 1743-2944

Source： Surface Engineering, Vol.22, Iss.1, 2006-02, pp. : 15-25

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

Preparation of fluorinated amorphous carbon nitride films by magnetron sputtering

By Yokomichi H.  

Surface Engineering, Vol. 16, Iss. 3, 2000-06 ,pp. : 229-233

Maney Publishing

Access to resources Recommend Favorite

Superelastic Fullerene-like Carbon Nitride Coatings Synthesised By Reactive Unbalanced Sputtering Magnetron

By Neidhardt J.   Czigány Zs.   Hultman L.  

Surface Engineering, Vol. 19, Iss. 4, 2003-08 ,pp. : 299-303

Maney Publishing

Access to resources Recommend Favorite

Investigation of processing parameters for pulsed closed field unbalanced magnetron sputtered titanium carbide thin films

By Anton J. M.   Mishra B.   Moore J. J.  

Surface Engineering, Vol. 23, Iss. 1, 2007-01 ,pp. : 23-27

Maney Publishing

Access to resources Recommend Favorite

Electrochemical behaviour of chromium nitride coatings with various preferred orientations deposited on steel by unbalanced magnetron sputtering

By Lee C. K.  

Materials Science and Technology, Vol. 22, Iss. 6, 2006-06 ,pp. : 653-660

Maney Publishing

Access to resources Recommend Favorite

S PHASE COATINGS PRODUCED BY UNBALANCED MAGNETRON SPUTTERING

By Dahm K. L.   Dearnley P. A.  

Surface Engineering, Vol. 12, Iss. 1, 1996-01 ,pp. : 61-67

Maney Publishing

Access to resources Recommend Favorite