Surface morphology and properties of zirconia thin films prepared at different deposition rates

Author: Zhang D. P.   Qi H. J.   Shao S. Y.   He H. B.   Shao J. D.   Fan Z. X.  

Publisher: Maney Publishing

ISSN: 1743-2944

Source: Surface Engineering, Vol.22, Iss.2, 2006-04, pp. : 157-160

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