Effects of ion beam voltage on properties of indium tin oxide films prepared by ion beam sputtering

Author： Lii D.-F.   Huang J.-L.   Jen I.-J.   Lin S.-S.  

Publisher： Maney Publishing

ISSN： 1743-2944

Source： Surface Engineering, Vol.23, Iss.4, 2007-07, pp. : 295-299

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