Relationship between composition, bonding constitution and microstructure in unbalanced magnetron sputtered Ti–B–N thin films

Author: Lu Y. H.   Shen Y. G.   Li K. Y.  

Publisher: Maney Publishing

ISSN: 1743-2944

Source: Surface Engineering, Vol.23, Iss.4, 2007-07, pp. : 307-312

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Abstract