A MODEL FOR COUPLED DOPANT DIFFUSION IN SILICON

Author: COWERN N.E.B.   GODFREY D.J.  

Publisher: Emerald Group Publishing Ltd

ISSN: 0332-1649

Source: COMPEL: Int J for Computation and Maths. in Electrical and Electronic Eng., Vol.6, Iss.1, 1993-12, pp. : 59-63

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Abstract