Microcrystalline thin-film solar cell deposition on moving substrates using a linear VHF-PECVD reactor and a cross-flow geometry

Author： Flikweert A J   Zimmermann T   Merdzhanova T   Weigand D   Appenzeller W   Gordijn A  

Publisher： IOP Publishing

ISSN： 0022-3727

Source： Journal of Physics D: Applied Physics, Vol.45, Iss.1, 2012-01, pp. : 15101-15108

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