Influence of stoichiometry and structure on the optical properties of AlNxOy films

Author: Borges J   Barradas N P   Alves E   Beaufort M F   Eyidi D   Vaz F   Marques L  

Publisher: IOP Publishing

ISSN: 0022-3727

Source: Journal of Physics D: Applied Physics, Vol.46, Iss.1, 2013-01, pp. : 15305-15315

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