New, fully automated, primary standard for generating vacuum pressures between 10-10 Pa and 3 x 10-2 Pa with respect to residual pressure

Author： Jousten K.   Menzer H.   Wandrey D.   Niepraschk R.  

Publisher： IOP Publishing

ISSN： 0026-1394

Source： Metrologia, Vol.36, Iss.6, 1999-12, pp. : 493-497

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