Calibration of displacement sensors up to 300 mum with nanometre accuracy and direct traceability to a primary standard of length

Author: Haitjema H.   Schellekens P. H. J.   Wetzels S. F. C. L.  

Publisher: IOP Publishing

ISSN: 0026-1394

Source: Metrologia, Vol.37, Iss.1, 2000-06, pp. : 25-33

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Abstract