CVD of polymeric thin films: applications in sensors, biotechnology, microelectronics/organic electronics, microfluidics, MEMS, composites and membranes

Author： Ozaydin-Ince Gozde     Gleason Karen K  

Publisher： IOP Publishing

ISSN： 0034-4885

Source： Reports on Progress in Physics, Vol.75, Iss.1, 2012-01, pp. : 16501-16540

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