Electromechanical Behavior of Interdigitated SiO2 Cantilever Arrays

Author: Zhi-Qiang Guan   Gang Luo   Lars Montelius   Hong-Xing Xu  

Publisher: IOP Publishing

ISSN: 0256-307X

Source: Chinese Physics Letters, Vol.27, Iss.2, 2010-02, pp. : 28503-28506

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Abstract