Ion-implanted Mechanism of the Deposition Process for Diamond-Like Carbon Films

Author： Xue-Min Wang Wei-Dong Wu Yu-Ying Wang Hai-Ping Wang Fang-Fang Ge Yong-Jia Tang Xin Ju

ISSN： 0256-307X

Source： Chinese Physics Letters, Vol.28, Iss.1, 2011-01, pp. : 16102-16105

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