Author: Lin Qiao Chen Liuhua Li Shu Wu X
Publisher: IOP Publishing
ISSN: 0957-0233
Source: Measurement Science and Technology, Vol.22, Iss.1, 2011-01, pp. : 15303-15308
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Abstract
A compact-size fiber optic accelerometer was designed to achieve both high resolution and wide dynamic range concurrently. An optical cavity, with its length modulated by a piezoelectric oscillator at audio frequency, is utilized to resolve the nanometer-level displacement of a silicon micro-mirror which serves as an inertial mass for acceleration sensing. Strain analysis of the proof-mass flexure structure by Cosmosworks was carried out to calculate responsivity and resonance frequency for a comparison with experimental measurement. The responsivity below the structural resonance frequency of 160 Hz reaches 36 dB re 1 rad/
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