Performing three-dimensional measurements on micro-scale features using a flexible coordinate measuring machine fiber probe with ellipsoidal tip

Author： Muralikrishnan B   Stone J   Shakarji C   Stoup J  

Publisher： IOP Publishing

ISSN： 0957-0233

Source： Measurement Science and Technology, Vol.23, Iss.2, 2012-02, pp. : 25002-25010

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