Sensitivity analyses of furnace material properties in the Czochralski crystal growth method for silicon

Author: Noghabi O R Asadi   M’Hamdi M   Jomâa M  

Publisher: IOP Publishing

ISSN: 0957-0233

Source: Measurement Science and Technology, Vol.24, Iss.1, 2013-01, pp. : 15601-15609

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Abstract