Auto focus and image registration techniques for infrared imaging of microelectronic devices

Author： Florian Daniela   Köck Helmut   Plankensteiner Kathrin   Glavanovics Michael  

Publisher： IOP Publishing

ISSN： 0957-0233

Source： Measurement Science and Technology, Vol.24, Iss.7, 2013-07, pp. : 74020-74030

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