Auto focus and image registration techniques for infrared imaging of microelectronic devices

Author: Florian Daniela   Köck Helmut   Plankensteiner Kathrin   Glavanovics Michael  

Publisher: IOP Publishing

ISSN: 0957-0233

Source: Measurement Science and Technology, Vol.24, Iss.7, 2013-07, pp. : 74020-74030

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Abstract