Measuring the roughness of buried interfaces by sputter depth profiling

Author： Baryshev S V   Klug J A   Zinovev A V   Tripa C E   Peng Q   Elam J W   Veryovkin I V  

Publisher： IOP Publishing

ISSN： 0957-4484

Source： Nanotechnology, Vol.24, Iss.1, 2013-01, pp. : 15708-15713

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