Dust grain charging in RF discharges

Author: Bacharis M   Coppins M   Allen J E  

Publisher: IOP Publishing

ISSN: 0963-0252

Source: Plasma Sources Science and Technology, Vol.19, Iss.2, 2010-04, pp. : 25002-25012

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract