Chemical vapour deposition enhanced by atmospheric microwave plasmas: a large-scale industrial process or the next nanomanufacturing tool?

Author： Belmonte T   Gries T   Cardoso R P   Arnoult G   Kosior F   Henrion G  

Publisher： IOP Publishing

ISSN： 0963-0252

Source： Plasma Sources Science and Technology, Vol.20, Iss.2, 2011-04, pp. : 24004-24010

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