Characterization of an asymmetric parallel plate radio-frequency discharge using a retarding field energy analyzer

Author： Gahan D   Daniels S   Hayden C   Sullivan D O'   Hopkins M B  

Publisher： IOP Publishing

ISSN： 0963-0252

Source： Plasma Sources Science and Technology, Vol.21, Iss.1, 2012-02, pp. : 15002-15013

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