Author： Jašík J. Macko P. Martišovitš V. Lukáč P. Veis P.
Publisher： Springer Publishing Company
ISSN： 0011-4626
Source： Czechoslovak Journal of Physics, Vol.54, Iss.6, 2004-06, pp. : 661-676
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Abstract
The dissociation efficiency of a pulsed RF discharge (with duty cycle 1:1 and discharge duration 0.2, 1, 5, and 20 ms) in oxygen at pressures from 1 to 5 torr and effective discharge currents from 50 to 210 mA has been studied. For monitoring of the atomic oxygen density the method of actinometry has been used. In order to evaluate the absolute dissociation degree, a numerical model has been developed and actinometric coefficients were calculated. Maximal degree of the dissociation reached value of 0.05. A saturation of the dissociation degree at higher pressures was observed and discussed.
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