Monte Carlo study of the high temperature hydrogen cleaning process of 6H-silicon carbide for subsequent growth of nano scale metal oxide films

Author： Uddin Ghulam Moeen   Ziemer Katherine S.   Sun Bing   Zeid Abe   Kamarthi Sagar  

Publisher： Inderscience Publishers

ISSN： 1746-9392

Source： International Journal of Nanomanufacturing, Vol.9, Iss.5-6, 2013-11, pp. : 407-430

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