Author： Kim Hyun-Ha Sugasawa Masami Hirata Hiroshi Teramoto Yoshiyuki Kosuge Katsunori Negishi Nobuaki Ogata Atsushi
Publisher： Springer Publishing Company
ISSN： 0272-4324
Source： Plasma Chemistry and Plasma Processing, Vol.33, Iss.6, 2013-12, pp. : 1083-1098
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