Effect of Surface Energy on the Wear Process of Bulk-Fabricated MEMS Devices

Author: Shen Sihan   Meng Yonggang  

Publisher: Springer Publishing Company

ISSN: 1023-8883

Source: Tribology Letters, Vol.52, Iss.2, 2013-11, pp. : 213-221

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract